LEYBOLD TURBOVAC50

The LEYBOLD TURBOVAC50 module is a 50 L/s turbomolecular pump module from Leybold for vacuum systems. The module has the characteristics of fast pumping speed, low vibration and low noise, and can be used in various industrial and scientific research applications.

Product parameter
Pumping speed: 50 L/s
Limit pressure: 10^-9mbar
Speed: 72000rpm

Power: 1.5kW
Voltage: 230V AC
Dimensions: 300 x 300 x 300 mm
Weight: 20kg
specification
Pumping speed

Pumping speed: 50 L/s
Limit pressure: 10^-9mbar
Rotational speed

Speed: 72000rpm
power

Power: 1.5kW
Voltage: 230V AC
environment

Operating temperature: 10°C to 40°C
Storage temperature: -20°C to 70°C
Humidity: 20% to 80% (non-condensing)
dimension

300 x 300 x 300 mm
weight

20kg
Apply
Semiconductor manufacturing
Thin film deposition