LAM 810-073479-215
Description: LAM 810-073479-215 Etching cavity temperature controller module is a key component of the LAM Research Etch series etching system for controlling the temperature of the etching cavity. The module has the following features:
High precision: High precision temperature sensor and control chip are used to ensure t
he accurate control of the temperature of the etching cavity.
Fast response: It has a fast response speed and can quickly track the change of temperature setpoint.
Good stability: It has good temperature stability to ensure the stability and consistency of the etching process.
Easy maintenance: Modular design for easy maintenance and replacement.
Product parameters:
Parameter value unit
Temperature range -50°C to 200°C
Accuracy ±0.1°C °C
Resolution 0.01°C °C
Control Mode PID control –
Power 500 W W
Voltage level 24 V DC V
Dimensions 150 mm x 100 mm x 50 mm
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Specifications:
Meet SEMI S2 standard
CE certified
Meets UL 508 standard
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