AMAT 0100-71304

The AMAT 0100-71304 module is a module manufactured by Applied Materials for semiconductor manufacturing equipment. The module has the following features:

Used to control chamber allocation
Supports multiple gas types

Easy to use
Product parameter

Parameter value
Module Type Chamber allocation module
Gas types

Installation mode Card slot installation
Dimensions 88.9mm x 22.5mm x 62.5mm
Weight 120g
specification

Ambient temperature: -40°C – 85°C
Relative humidity: ≤95% (non-condensing)
Vibration: ≤10g (5Hz-150Hz)