AMAT 0010-27983

AMAT 0010-27983 is a component manufactured by Applied Materials (AMAT) for use in semiconductor manufacturing equipment. According to the available information, the module is commonly referred to as the 300MM MCA E-CHUCK ESC HEATER, that is, the 300mm mechanical gripper electronic adsorption disk heater.

Product functions and applications

Heating function: The main function of this module is to provide heating function for semiconductor wafer holder. In the semiconductor manufacturing process, precise temperature control is crucial.
Application scenario: Mainly used in semiconductor manufacturing equipment, such as plasma etching machine, chemical vapor deposition equipment, etc., for heating wafer holders to meet specific process requirements.
peculiarity
High precision temperature control: ensures temperature stability in the semiconductor manufacturing process.
High reliability: Designed for harsh industrial environments.
Strong compatibility: Compatible with a variety of AMAT devices.
Look out
Professional equipment: The module is a high-precision industrial equipment that requires professional installation and maintenance.
Customization: Due to the diversity of semiconductor manufacturing processes, the specific parameters and specifications of this module may vary by device model.
Safety precautions: Strictly follow the safety regulations when operating and maintaining the module.