LAM 810-800082-043
Description: The LAM 810-800082-043 module is a VME sub-card manufactured b
y LAM Research for etching machine control systems. The module has the following features:
Based on VMEbus standard
Provides I/O interfaces
Programmable logic Control (PLC) function
Supports RS-232 and RS-485 communication
Product parameters:
Parameter value unit
Bus standard VMEbus –
I/O interface Digital input/output, analog input/output –
Control function PLC –
Communication interface RS-232, RS-485 –