BROOKS AUTOMATION 001-4130-03
The Brooks Automation 001-4130-03 module is a vacuum wafer alignment controller manufactured by Brooks Automation. It is commonly used in the semiconductor manufacturing process to control the vacuum wafer alignment system, ensuring that the wafer can be accurately aligned during processing.
Product name
Full name: Brooks Automation 001-4130-03 Vacuum wafer alignment controller
Full English name: Brooks Automation 001-4130-03 Vacuum Wafer Aligner Controller
Product description
The 001-4130-03 module is the core component of vacuum wafer alignment machines such as Brooks Automation VTR-5 / MTR-5 / Magnatran 7. It is responsible for controlling the movement, alignment, clamping and other actions of the wafer to ensure that the wafer can be accurately positioned during processing.