BALZERS IKR020
The Chinese name for the BALZERS IKR020 module is the IKR020 Thin Film Deposition Controller. It is a controller produced by Oerlikon Balzers for controlling the film deposition process. It has the following characteristics:
High accuracy: Precise control of film deposition thickness, uniformity and composition
High reliability: Advanced control technology and high-quality components are used to ensure the stability and reliability of the controller
Easy to use: Provide a friendly user interface and a variety of control functions for easy user operation
Strong versatility: support a variety of film deposition processes and equipment
Product description
The module is mainly used to control the film deposition process of vacuum coating equipment. It has the following main functions:
Control vacuum degree, temperature, pressure and other parameters
Control film deposition rate and thickness
Control film composition
Record and analyze film deposition data
Product parameter
Parameter value
Model IKR020
Control accuracy thickness: ± 0.1nm; Uniformity: ±1%; Composition: ±0.1%
Control range Temperature: -196°C to +1000°C; Pressure: 10^-10 to 10^3 mbar
Film deposition rate from 0.1 nm/s to 10 µm/s
Film composition of a variety of elements
Interfaces RS-232, RS-485, Ethernet