ENI GHW-12Z is a high power RF generator for plasma processing and other applications. It belongs to ENI’s GHW family and is known for its high reliability, efficiency and ease of use. The module is often used in semiconductor manufacturing, thin film deposition and other processes.

Product description

High-frequency RF source: The GHW-12Z produces high-frequency RF energy for plasma excitation.
High power output: Provides up to 1250 watts of RF power for a wide range of applications.
Frequency stability: High frequency stability to ensure repeatability of the process.
Water cooling design: water cooling design, effective heat dissipation, to ensure the long-term

stable operation of the equipment.
Digital control: Provides a variety of digital control interfaces for easy integration with other devices.
Product parameters (part)
Typical value of parameter
The output power is 1250W
Frequency 13.56MHz
Modulation mode AM/FM