ABB SA9923A-E
The ABB SA9923A-E module is an electrostatic sucker (ESC) module for LAM etchers
and ashers. The module is used to hold the wafer in a vacuum chamber and keep it stable during etching or ashing. The module is suitable for a variety of semiconductor manufacturing applications, including:
Wafer fabrication
MEMS manufacturing
LED manufacturing
Photovoltaic manufacturing
The module has the following features:
High precision
High reliability
Fast response time
Long service life
Product parameters:
Parameter value unit
Wafer size 200 mm mm
Pressure range 0 to 1000 tools
Temperature range 0°C to 200°C
Power supply voltage 24 V DC V DC
Power consumption 20 W W
Dimensions 300 x 300 x 100 mm mm
Weight 10 kg kg