The LAM 719-101612-887 module may be an electrostatic sucker (ESC) component 1 manufactured by LAM Research Corporation.
Electrostatic chuck (ESC) components are commonly used in semiconductor wafer etching and ashing equipment to hold the wafer through an electrostatic field for accurate alignment and machining 1.
The module may have features such as high clamping force, uniform electrostatic field, and low particle generation to ensure safe clamping, accurate alignment, and clean handling of the wafer1.
Product parameter
Part number: 719-101612-887
Product Type: Electrostatic Chuck (ESC) components
Product brand: LAM Research Corporation
Manufacturer: LAM Research Corporation
Chuck size: Not explicitly given, but similar LAM products such as LAM 839-101612-887 have a chuck size of 200mm 1.
Voltage range: Not explicitly given, but similar LAM products may have a voltage range of 0-1000V1.
Current capacity: Not explicitly given, but similar LAM products may have a current capacity of 10A1.
Vacuum compatibility: Yes
Coolant compatibility: Yes