LAM 810-102361-222

The LAM 810-102361-222 module is a component in the LAMETCH family of etching tools for switching gases and chemicals between etching chambers. It is a precision electronic component that ensures the accuracy and consistency of the etching process.

The module has the following features:

High precision gas and chemical switching
High reliability

Easy to maintain
Strong scalability
Product parameter
Module type: Chamber MUX module
System type: LAMETCH
Number of gas and chemical channels: 8
Interface type: electrical interface
Communication interface: RS-485
Power supply voltage: 24 V DC
Power consumption: < 20 W
specification
Dimensions: 160 mm x 80 mm x 40 mm
Weight: 500 g
Operating temperature: 0°C to +50°C
Storage temperature: -20°C to +60°C
Protection class: IP65